Technician III- Equipment (Subfab)

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Job Description:

The Subfab Technician supports semiconductor manufacturing operations by performing installation, maintenance, troubleshooting, and repair of vacuum pumps, abatement systems, and related sub-fab equipment, to include chillers and heat exchangers. This role ensures high tool uptime, stable process performance, and compliance with safety and cleanroom standards.

Shift: 1st

Key Responsibilities:

Preventive & Corrective Maintenance

• Perform scheduled preventive maintenance (PM) on dry pumps, turbo pumps, cryo pumps, and abatement systems.
• Diagnose mechanical, electrical, and vacuum-related issues and perform corrective repairs.
• Rebuild pump components (bearings, seals, shafts, motors) according to OEM procedures.

Equipment Support

• Support sub-fab equipment for process tools including CVD, PVD, Etch, Implant, Lithography, and Wet-Etch systems.
• Monitor pump performance parameters (pressure, vibration, temperature, power consumption) and take action to maintain uptime.
• Change filters, traps, and other consumables.

Documentation & Compliance

• Maintain accurate maintenance logs, PM checklists, and repair documentation.
• Follow cleanroom, sub-fab, and safety protocols (LOTO, chemical handling, gas safety, PPE requirements).

Technical Support

• Collaborate with process engineers, equipment engineers, and manufacturing technicians to solve equipment issues.
• Communicate equipment status, failures, and root-cause findings.
• Assist with pump installation, commissioning, and tool hookups.

Continuous Improvement

• Recommend improvements for pump reliability, component life, and tool uptime.

Requirements/Qualifications:

Education & Experience

• High school diploma required. Associate degree in Mechanical, Electrical, or related field (preferred: AS degree or technical certification) preferred.
• 3+ years of experience in vacuum systems, pumps, HVAC, mechanical maintenance, or semiconductor sub-fab environments (entry-level considered with training) required.

Skills

• Knowledge of vacuum technology, mechanical systems, rotating equipment, and electrical fundamentals.
• Ability to read schematics, mechanical drawings, and OEM manuals.
• Strong troubleshooting and problem-solving skills.
• Comfortable working in cleanroom/sub-fab environments and around hazardous chemicals and gases.

Preferred Experience

• Experience with OEM pump brands (Edwards, Pfeiffer, Ebara, Leybold, Busch, ULVAC).
• Semiconductor fab experience or military mechanical/electrical background.
• Knowledge of abatement systems, scrubbers, and foreline maintenance.

Travel Time:

Physical Attributes:

Physical Requirements:

Pay Range:

Benefits of working at Microchip

Microchip Technology Inc is an equal opportunity/affirmative action employer. All qualified applicants will receive consideration for employment without regard to sex, gender identity, sexual orientation, race, color, religion, national origin, disability, protected Veteran status, age, or any other characteristic protected by law.

For more information on applicable equal employment regulations, please refer to the Know Your Rights: Workplace Discrimination is Illegal Poster.

To all recruitment agencies: Microchip Technology Inc. does not accept unsolicited agency resumes. Please do not forward resumes to our recruiting team or other Microchip employees. Microchip is not responsible for any fees related to unsolicited resumes.